Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan - Hanaizumi, Osamu; Unno, Masafumi; Miura, Kenta (Trans Tech Publications, 2012)
Description based upon print version of record.
Keywords: Silicon : Congresses; Nanostructures : Congresses; Microelectronics : Congresses