International Symposium on Semiconductor Manufacturing, IEEE Electron Devices Society, Ultra Clean Society, Semiconductor Equipment and Materials International, Components, Packaging & Manufacturing Technology Society, & Institute Electrical Engineers Staff Corporate Author. (1997). IEEE International Symposium on Semiconductor Manufacturing conference proceedings. Institute of Electrical and Electronics Engineers.
Chicago-tyylinen lähdeviittausInternational Symposium on Semiconductor Manufacturing, IEEE Electron Devices Society, Ultra Clean Society, Semiconductor Equipment and Materials International, Packaging & Manufacturing Technology Society Components, ja Institute Electrical Engineers Staff Corporate Author. IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. Piscataway, N.J.: Institute of Electrical and Electronics Engineers, 1997.
MLA-viiteInternational Symposium on Semiconductor Manufacturing, et al. IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. Institute of Electrical and Electronics Engineers, 1997.
Harvard-tyylinen lähdeviittausInternational Symposium on Semiconductor Manufacturing, IEEE Electron Devices Society, Ultra Clean Society, Semiconductor Equipment and Materials International, Components, P. &. M. T. S. & Institute Electrical Engineers Staff Corporate Author. 1997. IEEE International Symposium on Semiconductor Manufacturing conference proceedings. Piscataway, N.J.: Institute of Electrical and Electronics Engineers.
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