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An 80 × 25 pixel CMOS single-photon image sensor with sub-ns time gating for solid state 3D scanning

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An 80 × 25 pixel CMOS single-photon image sensor with sub-ns time gating for solid state 3D scanning

Abstract

Imager topology with sub-ns time gating for 3D distance measurement application and first measurement results of the prototype are presented. The imager has a fully digital operating principle with single-photon avalanche diode detectors and on-chip narrow gating of pixel groups. The prototype detector has 80 × 25 pixels with a fill factor of 34 % in the sensor area. The chip has been fabricated in a 0.35 μm high-voltage process and occupies 5.69 × 5.02 mm2 area.

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